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PS-M40K20K-3中文资料ENTEGRIS数据手册PDF规格书
PS-M40K20K-3规格书详情
APPLICATIONS
• High-purity, corrosive chemical handling
Semiconductor applications
○ Photolithography
○ Bulk chemical delivery
○ CMP
○ Wet etch and clean
○ High-temperature cleaning processes
•
• Solar, LED, flat panel display
• Excellent performance with low surface tension chemistries
