PE-8V-3中文资料ENTEGRIS数据手册PDF规格书
PE-8V-3规格书详情
APPLICATIONS
• High-purity, corrosive chemical handling
Semiconductor applications
○ Photolithography
○ Bulk chemical delivery
○ CMP
○ Wet etch and clean
○ High-temperature cleaning processes
•
• Solar, LED, flat panel display
• Excellent performance with low surface tension chemistries
