PE-8K-3中文资料ENTEGRIS数据手册PDF规格书
PE-8K-3规格书详情
APPLICATIONS
• High-purity, corrosive chemical handling
Semiconductor applications
○ Photolithography
○ Bulk chemical delivery
○ CMP
○ Wet etch and clean
•
• High temperature cleaning processes
• Solar, LED, Flat Panel Display
• Excellent performance with low surface tension chemistries
