KX310CR-MZ数据手册ROHM中文资料规格书

描述 Description

KX310CR-MZ is a MEMS capacitive 3-axis accelerometer using Kionix™ Technology (Kionix™ Technology is defined by the proprietary plasma micromachining process and the technology to hermetically seal at a wafer level by bonding the silicon lid wafer to the device wafer.). Acceleration ranges of ±2 g, ±4 g and ±8 g are supported. Acceleration sensing is based on the principle of a differential capacitance arising from acceleration-induced motion of the sense element which further utilize common mode cancellation to decrease errors from process variation, temperature, and environmental stress.

特性 Features

• Kionix™ Technology (Kionix™ Technology is defined by the proprietary plasma micromachining process and the technology to hermetically seal at a wafer level by bonding the silicon lid wafer to the device wafer.)
• AEC-Q100 Qualified (Grade 3)
• Selectable Acceleration Range
• Selectable Output Data Rate
• Selectable Low Power or High Resolution Mode
• Digital High-pass Filter Outputs
• Low Power Mode with Optimization
• Configurable Wake-up / Back-to-sleep Function
• Digital I²C up to 400 kHz
• Digital SPI up to 10 MHz
• Lead-free Solderability
• Excellent Temperature Performance
• High Shock Survivability
• Factory Programmed Offset and Sensitivity
• Self-test Function