4-G3310-XX中文资料TDK株式会社数据手册PDF规格书

General Description

GYPRO® product line is an established family of Micro-Electro-Mechanical Systems (MEMS) angular rate sensor specifically designed for demanding applications.

The MEMS transducer is manufactured using Tronics proprietary vacuum wafer-level packaging technology based on micro-machined thick single crystal silicon.

The integrated circuit (IC) provides a stable primary anti-phase vibration of the ‘drive’ proof masses, thanks to electrostatic comb drives. When the sensor is subjected to a rotation, the Coriolis force acts on the ‘sense’ proof masses and forces them into a secondary anti-phase movement perpendicular to the direction of drive vibration, which is itself counter-balanced by electrostatic forces. The sense closed loop operates as an electromechanical ΣΔ modulator providing a digital output. This output is finally demodulated using the drive reference signal.

The sensor is factory calibrated and compensated for temperature effects to provide high-accuracy digital output over a broad temperature range.

Raw data output can be also chosen to enable customer-made compensations.

Features

• Digital angular rate sensor with SPI interface

• Angular rate measurement around Z-axis (yaw)

• ±300°/sec input range

• Ultra low noise

• Excellent bias instability

• 24 bit angular rate output

• Embedded temperature sensor for on-chip or external temperature compensation

• Built-in Self-Test

• 5V single supply voltage

• Low operating current consumption: 25mA

• CLCC 30 package: 19.6 mm x 11.5 mm x 2.9 mm

• Weight : 2 grams

• REACH and RoHS compatible

Applications

• Precision instrumentation

• Platform stabilization and control

• Unmanned aerial vehicles