Low-g Micromachined Accelerometer

The MMA series of silicon capacitive, micromachined accelerometers feature signal conditioning, a 2-pole low pass filter and temperature compensation. Zero-g offset full scale span and filter cutoff are factory set and require no external devices. A full system self-test capability verifies system functionality.

Features

• Integral Signal Conditioning

• Linear Output

• 2nd Order Bessel Filter

• Calibrated Self-test

• EPROM Parity Check Status

• Transducer Hermetically Sealed at Wafer Level for Superior Reliability

• Robust Design, High Shock Survivability

• Qualified AECQ100, Rev. F Grade 2 (-40°C/ +105°C)

Typical Applications

• Vibration Monitoring and Recording

• Appliance Control

• Mechanical Bearing Monitoring

• Computer Hard Drive Protection

• Computer Mouse and Joysticks

• Virtual Reality Input Devices

• Sports Diagnostic Devices and Systems